Nano Fabrication Center @ University of Minnesota

Used in fields

Facilities contact

Greg Haugstad
charfac@umn.edu
(612) 626-7594
http://www.mrsec.umn.edu/Facilities/Facilities.php

Nano Fabrication Center

The Nanofabrication Center (NFC) is an interdisciplinary facility that supports faculty and industrial research within the Institute of Technology at the University of Minnesota, to support education, research and industrial collaboration in microelectronics and other related research involving nanofabrication.

Intrumentation: The Nano Fabrication Center main groups of equipment:
  • E-Beam, Ion Beam & Mask Making
  • Optical Photolithography
  • Chemical Vapor Deposition
  • Metalization & Sputtering
  • Dry Etching
  • Annealing, Oxidation & Doping
  • Wet Benches
  • Wafer Bonding, Polishing and Sawing
  • Characterization & Testing