Spectroscopic and Imaging Ellipsometer @ Columbia University

Supervisors: Professors Irving P. Herman and Rasti Levicky The direct contact for this ellipsometer is Shengguo Jia at 212-854-6666. Please contact Eric Holihan at 212-854-0260 for scheduling and training information. The Beaglehole Spectroscopic and Imaging System can be configured and operated as an: 1. Ellipsometer (picometer) in a single region, either monochromatically at 6328 A (He-Ne laser) (10-15 micron spot size) or spectroscopically from 200 - 1050 nm, at variable angle. 2. Spectroscopic imaging ellipsometer over 2 mm x 2 mm to 1 cm x 1 cm with a spatial resolution of 3-5 microns, at variable angle. 3. Image-enhanced ellipsometer - on dual arms with the picometer and imaging system used at the same time. 4. Reflectance Difference Spectrometer (RDS). 5. Reflectometer. 6. Transmission or transmission ellipsometer. (Systems 1-3 are reflection ellipsometers.) 7. Circular dichroism/birefringence instrument. 8. Scatterometer, for dark field elastic scattering. Configurations 1 and 2 can be mounted on dual arms for two simultaneous and independent set-ups or for operation as system 3.