Stress In Thin Film and Small Scale Structures

Functional thin films and small scale structures are at the core of many advanced technologies -- microelectronics, optoelectronics, information storage, high-performance coatings, for example -- and they are key to emerging technologies -- micro-electromechanical systems (MEMS), quantum dot lasers, quantum computers, for example. A critical factor for the fabrication, performance and reliability of these structures is the residual stress acting within the material.