Microfabrication / Microelectronics / Clean Room https://www.mrsec.org/taxonomy/term/53/all en Central Facility for Microelectronics https://www.mrsec.org/facilities/central-facility-microelectronics <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>This facility, housed in a class-100/1000 cleanroom, supports a reasonably complete range of microelectronic processing capabilities. It is run on a user-fee basis, with access to all Brown faculty and outside users, with a couple of local high-tech start-up companies typically maintaining access privileges (requiring insurance and appropriate safety training) with established user fees. In 2009-2010, the facility supported over 100 users from 25 research groups.</p></div></div></div> Wed, 25 Mar 2015 04:32:59 +0000 admin 3324 at https://www.mrsec.org Device Fabrication & Measurements https://www.mrsec.org/facilities/device-fabrication-measurements <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>Device Fabrication and Measurements Laboratories include e-beam lithography system (Roberts 140, MSE Department), micro-contact printing (Bagley 195, Xia), and dip-pen lithography and vacuum deposition (Bagley 13B, Ginger). Device measurements include photonic (Roberts 209, Jen) and electronic (EE B052, Parviz) techniques. Contact Dr. Hanson Fong for details.</p> </div></div></div> Wed, 25 Mar 2015 13:46:19 +0000 admin 3454 at https://www.mrsec.org Lurie Nanofabrication Laboratory https://www.mrsec.org/facilities/lurie-nanofabrication-laboratory-0 <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>The Lurie Nanofabrication Facility serves technology educators and creators through broad access to advanced nanofabrication equipment and staff expertise in a safe, collaborative environment. We enable multi-disciplinary research, experiential learning, and co-operation with industry to advance cutting-edge technologies.</p> </div></div></div> Mon, 26 Feb 2024 17:03:42 +0000 admin 6873 at https://www.mrsec.org Materials Preparation and Measurement Laboratory (MPML) https://www.mrsec.org/facilities/materials-preparation-and-measurement-laboratory-mpml <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p style="margin: 0px 0px 10px; padding: 0px; border: 0px; vertical-align: baseline; color: rgb(102, 102, 102); font-family: Arial, Helvetica, sans-serif; line-height: 18px;">The Materials Preparation and Measurement Laboratory (MPML) provides facilities for preparation, fabrication, processing, patterning and characterization of many types of samples.</p></div></div></div> Wed, 25 Mar 2015 06:31:47 +0000 admin 3402 at https://www.mrsec.org Materials Processing Microfabrication Cleanroom https://www.mrsec.org/facilities/materials-processing-microfabrication-cleanroom <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p><span style="color: rgb(133, 136, 129); font-family: Verdana, Arial, Helvetica, sans-serif; font-size: 11px; line-height: 17px;">The Materials Research Center (MRC) cleanroom facility is devoted to materials processing, growth, device fabrication, characterization and electronic &amp; photonic materials.</span></p></div></div></div> Wed, 25 Mar 2015 06:31:47 +0000 admin 3372 at https://www.mrsec.org Micro/Nano Fabrication Laboratory (MNFL) https://www.mrsec.org/facilities/micronano-fabrication-laboratory-mnfl-0 <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>Our 5,000-square-foot clean room is used by Princeton University students, faculty, staff, and other researchers to fabricate semiconductor, microfluidic, and MEMS devices. The laboratory consists of  class 1000 rooms for deposition and etch, a class 100 room for lithography, a separate electron beam lithography cleanroom, a lapping/polishing lab, and a packaging lab.</p></div></div></div> Wed, 05 Aug 2020 13:55:05 +0000 divya.abhat 6562 at https://www.mrsec.org Micro/Nano Fabrication Laboratory (MNFL) https://www.mrsec.org/facilities/micronano-fabrication-laboratory-mnfl <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p> </p> <p>Our 5,000-square-foot clean room is used by Princeton University students, faculty, staff, and other researchers to fabricate semiconductor, microfluidic, and MEMS devices. The laboratory consists of  class 1000 rooms for deposition and etch, a class 100 room for lithography, a separate electron beam lithography cleanroom, a lapping/polishing lab, and a packaging lab.</p></div></div></div> Wed, 25 Mar 2015 06:31:47 +0000 admin 3387 at https://www.mrsec.org Microfabrication Facility https://www.mrsec.org/facilities/microfabrication-facility <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>The current microfabrication facility contains a contact mask alignment and photoresist exposure system, fume hoods, spin coating station, PDMS mixer and degasser, PDMS bonding equipment (oven, AC oxygen plasma), PDMS hole punch and stereo zoom microscope. The equipment is housed in a 250 sq. ft. class 10,000 clean room. With MRSEC funds we will expand our microfluidic fabrication needs, but we lack work stations dedicated to operating the devices. We are developing a shared facility where users can run chips using either pressure or volume control.</p></div></div></div> Wed, 25 Mar 2015 04:32:59 +0000 admin 3321 at https://www.mrsec.org Minnesota Nano Center (MNC) https://www.mrsec.org/facilities/minnesota-nano-center-mnc <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p style="margin: 0px 0px 0.5em; padding: 0px 10px 6px; color: rgb(0, 0, 0); font-family: Arial, Helvetica, sans-serif; line-height: 18px;">The Minnesota Nano Center, or MNC, is a state-of-the-art facility for interdisciplinary research in nanoscience and applied nanotechnology. The Center offers a comprehensive set of tools to help researchers develop new micro- and nanoscale devices, such as integrated circuits, advanced sensors, microelectromechanical systems (MEMS), and microfluidic systems.</p></div></div></div> Wed, 25 Mar 2015 13:46:19 +0000 admin 3430 at https://www.mrsec.org Nanoelectronics Facility https://www.mrsec.org/facilities/nanoelectronics-facility <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>This new facility consists of an SEM (FEI XL-30) for electron-beam lithography, a probe station (Cascade 12000) for electrical characterization, and three scanned-probe microscopes (SPMs) for in situ electrical measurement of devices concurrent with electrostatic force and scanned-gate microscopy. One SPM (DI-Dimension 5000) is configured for electrically contacting samples, and another SPM (JEOL-4210) has controlled environment (ambient to high vacuum, 120-800K) and electrical feedthrus for in situ electrical measurements.</p></div></div></div> Wed, 25 Mar 2015 06:31:47 +0000 admin 3412 at https://www.mrsec.org Nanofabrication Laboratory https://www.mrsec.org/facilities/nanofabrication-laboratory <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>The Penn State Nanofabrication Facility (Nanofab) is a fully staffed user research facility that enables fabrication and characterization of a wide range of devices to support fundamental and applied research in diverse fields spanning electronics to medicine. Over 400 researchers from Penn State, other universities, government labs, and industry take advantage of the expertise and world-class facilities of The Nanofabrication Laboratory.</p></div></div></div> Wed, 25 Mar 2015 06:31:47 +0000 admin 3385 at https://www.mrsec.org NanoSystems Laboratory (NSL) https://www.mrsec.org/facilities/nanosystems-laboratory-nsl <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>NanoSystems Laboratory is a user facility located on the main campus of the Ohio State University (Columbus, OH) in the Physics Research Building. The facility is open to all interested users on the user fee basis. Our goal is to provide academic and industrial users with access to advanced material characterization and fabrication tools for research and development applications.</p></div></div></div> Wed, 25 Mar 2015 06:31:47 +0000 admin 3377 at https://www.mrsec.org Shared Materials Characterization Laboratory (SMCL) https://www.mrsec.org/facilities/shared-materials-characterization-laboratory-smcl Fri, 15 Apr 2016 17:19:55 +0000 admin 6051 at https://www.mrsec.org The Nanoscale Fabrication Center (NFC) https://www.mrsec.org/facilities/nanoscale-fabrication-center-nfc <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>The Nanoscale Fabrication Center (NFC) at the University of Wisconsin-Madison provides a research facility for microfabrication technologies, products and innovations. In order to give students a state-of-the-art education and to maintain leading-edge research programs, we continue to improve this advanced laboratory.</p></div></div></div> Wed, 25 Mar 2015 13:46:19 +0000 admin 3460 at https://www.mrsec.org University of Delaware Nanofabrication Facility https://www.mrsec.org/facilities/university-delaware-nanofabrication-facility-0 <div class="field field-name-body field-type-text-with-summary field-label-hidden"><div class="field-items"><div class="field-item even" property="content:encoded"><p>The UD Nanofabrication Facility (UDNF) enables researchers from academia, industry and government to create devices smaller than a human hair, supporting scientific advances in fields ranging from medical diagnostics to environmental sensing to solar energy harvesting. </p> <p><i style="font-family: Arial, Helvetica, sans-serif;"><span style="color: black;">Facility Primary Contact:</span></i><span style="font-family: Arial, Helvetica, sans-serif; color: black;"> <a href="mailto:codreanu@udel.edu" style="color: rgb(17, 85, 204);" target="_blank">Iulian Codreanu</a></span></p> </div></div></div> Thu, 08 Oct 2020 05:56:41 +0000 admin 6588 at https://www.mrsec.org