Instrumentation:
- Class 1000 Cleanroom
- Dual-Source Thermal Evaporators
- Electron-Beam Lithography
- FEI Nova 600 Dual-Beam Focused Ion Beam System
- Irraditation Chamber for Nuclear Particle Tracks
- Kulicke & Soffa 4523 Wire Bonder
- Lambda-Physik Pulsed Laser Deposition System
- Lindberg/Blue Tri-Arc Furnace
- Mask Aligner
- Multilayer Electrochemical Deposition System
- Multiple-Source Supttering Chambers
- Projection Photolithography
- Tubular Furnaces (up to 1500 C)