Nanofabrication Facility (NNF) provides users with a broad range of nanofabrication and houses all standard thin film processing tools.
Instrumentation:
- Alcatel AMS 100
- ASML 193 nm PAS 5500 950B Step and Scan System
- DC Sputtering System
- GCA 8500DSW Stepper
- Headway Spinner: Photoresist Spinner
- Karl Suss MJB3 Mask Aligner &Karl Suss MA 6 Mask Aligner
- Kurt Lesker Electron Beam Evaporation System & 4" (Old) Electron Beam Evaporation System
- Laurell Spinner: Photoresist Spinner
- LPCVD
- Nano eNabler
- Nanometrics Nanospec/AFT
- Obducat NIL-2.5 Nanoimprinter
- Plasma Therm
- PM-600: Plasma Asher
- RAITH 150 TWO E-BEAM WRITER
- Resistive Heated Evaporation
- RF Magnetron Sputtering
- Semi Group RIE
- Solarex
- SVG 90-SE develop track
- Trion
- UHV-RTCVD System
- Veeco Dektak 150 Profilometer
- Woollam VASE (Variable Angle Spectroscopic Ellipsometer)
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