The Meyer Hall 425 Thin Film Deposition Lab contains a clean room and main area with thin film deposition equipment, fume hoods, and various equipment for optical and electronic characterization of films and devices.
Instrumentation:
- AJA Evaporation Chamber
- AJA Orion Sputter Chamber
- Cary 5G Spectrophotometer
- Glass Cutting Board
- Jelight Model 42 UVO-Cleaner
- Mellen S5-211-3 Tube Furnace
- Nicolet 6700 FT-IR Spectrometer
- Semicore Reactive Ion Etcher
- Semicore Sputter System
- Sentech SENDIRA FT-IR Ellipsometer
- Tencor P10 Profilometer
- Wet Chemical Etching