Fundamental Issues in Materials Integration on Silicon investigates the fundamental atomistic and mesoscopic mechanisms underlying the integration of materials, devices and structures on silicon, as an integration platform. Materials integration on Si leverages the power of CMOS through the addition of other components, thereby increasing function while maintaining the advantages and the versatility of Si processing and device technology. This research provides the foundation for development of vastly enhanced and totally new electronic devices. The MRSEC enables the assembly of broad expertise that allows us to address the detailed structural, chemical, and electronic issues underlying heterogeneous integration. Si is used as the model of a multi-functional material: as an integration platform, a template for growth of nanoscale structures, a mechanical element, and a semiconductor.